Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

Beginning with fundamentals, techniques, processes, and conditions, this book continues with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation), then moves on to construction-related features of EMM setup, power supply, roll of electrolyte, and other major factors influencing EMM processes.