Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nanomaterials, and MEMS, Second Edition

  • 8h 52m
  • Hidetoshi Kotera, Isaku Kanno, Kiyotaka Wasa
  • Elsevier Science and Technology Books, Inc.
  • 2012
Providing experimental data with detailed examples and theoretical descriptions, this guide introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.