Sputtering Materials for VLSI and Thin Film Devices

  • 10h 25m
  • Jaydeep Sarkar
  • Elsevier Science and Technology Books, Inc.
  • 2014
Including practical case-studies on target performance and troubleshooting, this important resource provides unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements.