Thin Film Materials Technology: Sputtering of Compound Materials

  • 6h 15m
  • Hideaki Adachi, Kiyotaka Wasa, Makoto Haber
  • Elsevier Science and Technology Books, Inc.
  • 2004
Rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, this invaluable resource explains sputter deposition technology in thin film production applications.