Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials

  • 5h 24m
  • Xiu-Tian Yan, Yongdong Xu
  • Springer
  • 2010
From physical fundamentals and principles, to optimisation of processing parameters and other practices, this book will guide readers through the development of both high performance materials and the design of CVD systems to manufacture such materials.