Fabrication of GaAs Devices

  • 7h 32m
  • Albert G. Baca, Carol I. H. Ashby
  • Institution of Engineering and Technology
  • 2005
Focusing on all aspects of GaAs processing that deal with GaAs free surfaces and interfaces between GaAs and metal contacts or dielectrics, this detailed text offers pragmatic advice on cleaning and passivation, wet and dry etching and photolithography.