Handbook of 3D Integration: 3D Process Technology

  • 6h 58m
  • Mitsumasa Koyanagi, Mitsumasa Koyanagi (eds), Philip Garrou
  • John Wiley & Sons (US)
  • 2014
Covering the intricate details of 3D process technology, this book provides invaluable reading for materials scientists, semiconductor physicists, and those working in the semiconductor industry, as well as IT and electrical engineers.